Browsing Materials Science by Subject "Silicon"

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    • Defect engineering in H and He implanted Si 

      Reboh, Shay (2008) [Thesis]
      The present work relates an investigation of H2 + and He+ coimplanted (001)-Si substrates. The phenomena of blistering and exfoliation were studied by SEM as a function of the implantation parameters (energy, fluence, ...