Mostrar el registro sencillo del ítem
Sequential phase formation by ion-induced epitaxy in fe-implanted si(001)
dc.contributor.author | Behar, Moni | pt_BR |
dc.contributor.author | Bernas, H. | pt_BR |
dc.contributor.author | Desimoni, Judith | pt_BR |
dc.contributor.author | Lin, X.W. | pt_BR |
dc.contributor.author | Maltez, Rogério Luis | pt_BR |
dc.date.accessioned | 2014-05-17T02:07:06Z | pt_BR |
dc.date.issued | 1996 | pt_BR |
dc.identifier.issn | 0021-8979 | pt_BR |
dc.identifier.uri | http://hdl.handle.net/10183/95366 | pt_BR |
dc.description.abstract | Ion-beam-induced epitaxial crystallization (IBIEC) of Fe-implanted Si(OO1) was studied by transmission electron microscopy and Rutherford backscattering spectrometry. For sufficiently high Fe doses, it was found that IBIEC at 320 °C results in sequential epitaxy of Fe silicide phases in Si, with a sequence of y-FeSi2, α-FeSi2 and β-FeSi2 with increasing Fe concentration along the implantation profile. The critical concentrations for the y-a and α-β phase transitions were determined as ≈ 11 and 21 at. % Fe, respectively. The observed sequential phase formation can be correlated to the degree of lattice mismatch with the Si matrix and the stoichiometry of the silicide phases. | en |
dc.format.mimetype | application/pdf | pt_BR |
dc.language.iso | eng | pt_BR |
dc.relation.ispartof | Journal of Applied Physics. Woodbury. Vol. 79, n. 2 (Jan. 1996), p. 752-762 | pt_BR |
dc.rights | Open Access | en |
dc.subject | Física da matéria condensada | pt_BR |
dc.subject | Crescimento epitaxial | pt_BR |
dc.subject | Retroespalhamento rutherford | pt_BR |
dc.subject | Microscopia eletrônica de transmissão | pt_BR |
dc.subject | Implantação de íons | pt_BR |
dc.title | Sequential phase formation by ion-induced epitaxy in fe-implanted si(001) | pt_BR |
dc.type | Artigo de periódico | pt_BR |
dc.identifier.nrb | 000141660 | pt_BR |
dc.type.origin | Estrangeiro | pt_BR |
Ficheros en el ítem
Este ítem está licenciado en la Creative Commons License
-
Artículos de Periódicos (40021)Ciencias Exactas y Naturales (6101)