Lattice strain distribution resolved by X-ray Braggsurface diffraction in an Si matrix distorted by embedded FeSi2 nanoparticles
dc.contributor.author | Lang, Rossano | pt_BR |
dc.contributor.author | Menezes, Alan Silva de | pt_BR |
dc.contributor.author | Santos, Adenilson Oliveira dos | pt_BR |
dc.contributor.author | Reboh, Shay | pt_BR |
dc.contributor.author | Meneses, Eliermes Arraes | pt_BR |
dc.contributor.author | Amaral, Livio | pt_BR |
dc.contributor.author | Cardoso, Lisandro Pavie | pt_BR |
dc.date.accessioned | 2014-03-26T01:51:15Z | pt_BR |
dc.date.issued | 2013 | pt_BR |
dc.identifier.issn | 0021-8898 | pt_BR |
dc.identifier.uri | http://hdl.handle.net/10183/89722 | pt_BR |
dc.description.abstract | Out-of-plane and primarily in-plane lattice strain distributions, along the two perpendicular crystallographic directions on the subsurface of a silicon layer with embedded FeSi2 nanoparticles, were analyzed and resolved as a function of the synchrotron X-ray beam energy by using ω: mappings of the (111) and (111) Bragg-surface diffraction peaks. The nanoparticles, synthesized by ionbeam- induced epitaxial crystallization of Fe+-implanted Si(001), were observed to have different orientations and morphologies (sphere- and plate-like nanoparticles) within the implanted/recrystallized region. The results show that the shape of the synthesized material singularly affects the surrounding Si lattice. The lattice strain distribution elucidated by the nonconventional X-ray Bragg-surface diffraction technique clearly exhibits an anisotropic effect, predominantly caused by plate-shaped nanoparticles. This type of refined detection reflects a key application of the method, which could be used to allow discrimination of strains in distorted semiconductor substrate layers. | en |
dc.format.mimetype | application/pdf | pt_BR |
dc.language.iso | eng | pt_BR |
dc.relation.ispartof | Journal of applied crystallography. Copenhagen. Vol. 46, no. 6 (Dec. 2013), p. 1796–1804 | pt_BR |
dc.rights | Open Access | en |
dc.subject | Nanopartículas | pt_BR |
dc.subject | Difração de raios X | pt_BR |
dc.subject | Cristalização | pt_BR |
dc.subject | Deformação | pt_BR |
dc.subject | Silício | pt_BR |
dc.title | Lattice strain distribution resolved by X-ray Braggsurface diffraction in an Si matrix distorted by embedded FeSi2 nanoparticles | pt_BR |
dc.type | Artigo de periódico | pt_BR |
dc.identifier.nrb | 000912012 | pt_BR |
dc.type.origin | Estrangeiro | pt_BR |
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