Navegação Ciências Exatas e da Terra por Assunto "Microfabricação"
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Characterization of metal oxide-based gas nanosensors and microsensors fabricated via local anodic oxidation using atomic force microscopy
(2013) [Artigo de periódico]Thiswork reports on nanoscale and microscalemetal oxide gas sensors, consisting ofmetal-semiconductor-metal barriers designed via scanning probe microscopy. Two distinctmetal oxides, molybdenum and titaniumoxides, were ...