Navegação Ciências Exatas e da Terra por Assunto "Flúor"
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Role of fluorine in suppressing boron transient enhanced diffusion in preamorphized Si
(2004) [Artigo de periódico]We have explained the role of fluorine in the reduction of the self-interstitial population in a preamorphized Si layer under thermal treatment. For this purpose, we have employed a B spike layer grown by molecular-beam ...