Navegação Ciências Exatas e da Terra por Assunto "Índio : elemento químico"
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Enhanced electrical activation of indium coimplanted with carbon in a silicon substrate
(1999) [Artigo de periódico]Electrical activation of In of 18%–52% of the implanted dose (531014 cm-²) was obtained in Si samples having a C+ coimplantation after rapid thermal annealing (RTA) at 800–1000 °C for 15 s. This electrical activation yield ...