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    • Micromachined microwave planar spiral inductors and transformers 

      Ribas, Renato Perez; Lescot, Jérome; Leclercq, Jean-Louis; Karam, Jean Michel; Ndagijimana, Fabien (2000) [Journal article]
      A new micromachined planar spiral inductor, with the strips suspended individually, has been fabricated in standard GaAs high electron-mobility transistor monolithic-microwave integrated-circuit technology through maskless ...