Navegação Ciências Exatas e da Terra por Autor "Mazen, Frédéric"
Resultados 1-1 de 1
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Unraveling structural and compositional information in 3D FinFET electronic devices
Trombini, Henrique; Marmitt, Gabriel Guterres; Vellame, Igor Alencar; Baptista, Daniel Lorscheitter; Reboh, Shay; Mazen, Frédéric; Pinheiro, Rafael Bortolin; Sanchez, Dario Ferreira; Senna, Carlos Alberto; Archanjo, Braulio Soares; Achete, Carlos A.; Grande, Pedro Luis (2019) [Artigo de periódico]Non-planar Fin Field Effect Transistors (FinFET) are already present in modern devices. The evolution from the well-established 2D planar technology to the design of 3D nanostructures rose new fabrication processes, but a ...