Navegação Ciências Exatas e da Terra por Autor "Li, W."
Resultados 1-1 de 1
-
Evidence of aluminum silicate formation during chemical vapor deposition of amorphous Al/sub 2/O/sub 3/ thin films Si(100)
Klein, T.M.; Niu, D.; Epling, W.S.; Li, W.; Maher, D.M.; Hobbs, C.C.; Hegde, R.I.; Baumvol, Israel Jacob Rabin; Parsons, G.N. (1999) [Artigo de periódico]Using narrow nuclear reaction resonance profiling, aluminum profiles are obtained in ;3.5 nm Al2O3 films deposited by low temperature ~,400 °C! chemical vapor deposition on Si~100!. Narrow nuclear resonance and Auger depth ...