Listar Ciencias Exactas y Naturales por autor "Krautschneider, Wolfgang"
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Stabilization of higher-k tetragonal HfO/sub 2/ by SiO/sub 2/ admixture enabling thermally stable metal-insulator-metal capacitors
Böscke, Tim S.; Govindarajan, Shrinivas; Kirsch, Paul D.; Hung, Puiyee Y.; Krug, Cristiano; Lee, Byoung Hun; Heitmann, Johannes; Schröder, Uwe; Pant, Gaurang; Gnade, Bruce E.; Krautschneider, Wolfgang (2007) [Artículo de periódico]The authors report the relationship between HfO2 crystalline phase and the resulting electrical properties. Crystallization of amorphous HfO2 into the monoclinic phase led to a significant increase in leakage current and ...