Browsing Exact and Earth Sciences by Author "Tatsch, Felipe Wolff"
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Metal transport and loss in ultrathin hafnium aluminate films on silicon studied by low, medium, and high energy ion beam analyses
Miotti, Leonardo; Driemeier, Carlos Eduardo; Tatsch, Felipe Wolff; Radtke, Claudio; Baumvol, Israel Jacob Rabin (2006) [Journal article]Metal transport and loss induced by thermal annealing in ultrathin HfAlxOy films deposited on Si by atomic layer deposition were investigated by ion beam analysis. It was observed that rapid thermal annealing at 1000 °C ...