Browsing Exact and Earth Sciences by Author "Glass, Gary A."
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Direct etching of SiO2 and Al2O3 by 900-keV gold ions
Glass, Gary A.; Dias, Johnny Ferraz; Dymnikov, Alexander D.; Houston, Louis M.; Rout, Bibhudutta (2009) [Journal article]We report the direct etching of Al2O3 and SiO2 using 900-keV Au+ ions. 2000-mesh Cu grids were employed as masks using two different configurations: 1 the Cu mesh was placed on top of each insulator separately and independent ...