Compositional stability of hafnium aluminates thin films deposited on Si by atomic layer deposition
dc.contributor.author | Driemeier, Carlos Eduardo | pt_BR |
dc.contributor.author | Bastos, Karen Paz | pt_BR |
dc.contributor.author | Miotti, Leonardo | pt_BR |
dc.contributor.author | Baumvol, Israel Jacob Rabin | pt_BR |
dc.contributor.author | Nguyen, N. V. | pt_BR |
dc.contributor.author | Sayan, S. | pt_BR |
dc.contributor.author | Krug, Cristiano | pt_BR |
dc.date.accessioned | 2016-05-19T02:09:44Z | pt_BR |
dc.date.issued | 2005 | pt_BR |
dc.identifier.issn | 0003-6951 | pt_BR |
dc.identifier.uri | http://hdl.handle.net/10183/141320 | pt_BR |
dc.description.abstract | We have used nuclear reaction analyses and Rutherford backscattering spectrometry to investigate quantitatively the compositional stability of hafnium aluminate thin films deposited on Sis001d by atomic layer deposition using HfCl4/H2O and AlsCH3d3/H2O precursors. It was found that increasing Al/Hf deposition cycles ratio leads to increasing oxygen deficiency in the as-deposited films as well as to increasing metal losses sup to ,15%d from the films after rapid thermal annealing at 1000 °C. Furthermore, isotopic substitution experiments, showed that incorporation of oxygen from the gas phase is eased in the cases where deposition conditions failed to supply enough oxygen to complete oxides stoichiometry. | en |
dc.format.mimetype | application/pdf | pt_BR |
dc.language.iso | eng | pt_BR |
dc.relation.ispartof | Applied physics letters. Vol. 86, no. 22 (May 2005), 221911, 3 p. | pt_BR |
dc.rights | Open Access | en |
dc.subject | Alumina | pt_BR |
dc.subject | Filmes finos dieletricos | pt_BR |
dc.subject | Recozimento térmico rápido | pt_BR |
dc.subject | Retroespalhamento rutherford | pt_BR |
dc.subject | Estequiometria | pt_BR |
dc.title | Compositional stability of hafnium aluminates thin films deposited on Si by atomic layer deposition | pt_BR |
dc.type | Artigo de periódico | pt_BR |
dc.identifier.nrb | 000523045 | pt_BR |
dc.type.origin | Estrangeiro | pt_BR |
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