Browsing by Author "Weller, R.A."

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    • Comparison of nitrogen incorporation in SiO/sub 2//SiC and SiO/sub 2/Si structures 

      McDonald, K.; Huang, M.B.; Weller, R.A.; Feldman, L.C.; Williams, J.R.; Stedile, Fernanda Chiarello; Baumvol, Israel Jacob Rabin; Radtke, Claudio (2000) [Journal article]
      The nitrogen content of SiO2/SiC (4H) structures annealed in NO and N2O has been measured using nuclear reaction analysis. Samples were annealed in 15N18O or 15N2O at 1000 °C at a static pressure of 10 mbar for either 1 ...