Browsing by Author "Özelt, G."
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Cu gettering in ion implanted and annealed silicon in regions before and beyond the mean projected ion range
Kögler, R.; Peeva, Anita; Lebedev, Andrei; Posselt, Matthias; Skorupa, Wolfgang; Özelt, G.; Hutter, Herbert; Behar, Moni (2003) [Journal article]The strong gettering of Cu atoms in single-crystal Si implanted with 3.5 MeV P+ ions is studied after thermal treatment and Cu contamination. Cu decorates the remaining implantation damage. Three separate Cu gettering ...