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dc.contributor.authorRibas, Renato Perezpt_BR
dc.contributor.authorLescot, Jéromept_BR
dc.contributor.authorLeclercq, Jean-Louispt_BR
dc.contributor.authorKaram, Jean Michelpt_BR
dc.contributor.authorNdagijimana, Fabienpt_BR
dc.date.accessioned2011-01-28T05:59:02Zpt_BR
dc.date.issued2000pt_BR
dc.identifier.issn0018-9480pt_BR
dc.identifier.urihttp://hdl.handle.net/10183/27560pt_BR
dc.description.abstractA new micromachined planar spiral inductor, with the strips suspended individually, has been fabricated in standard GaAs high electron-mobility transistor monolithic-microwave integrated-circuit technology through maskless front-side bulk micromachining. The electronic compatibility, the use of industrial integrated-circuit production lines, the straightforward and low-cost additional procedure for structure releasing, and the very short etching time required to do such are the principal features related to such a novel inductor structure. Moreover, the air–gap layer created underneath the device and between the strips significantly reduces shunt and fringing parasitic capacitances, consequently increasing the performance and operating frequency range Experimental measurements, carried out up to 15 GHz, before and after micromachining, showed for a 12-nH inductor an increase of the maximum Q factor from 5 (at 3 GHz) to about 20 (at 7 GHz), while the self-resonant frequency was shifted from 5 to 13 GHz. Furthermore, a structure with two interleaved spiral inductors, in a 1 : 1 transformer-like configuration, was also fabricated, and its performance was verified as well in order to demonstrate the promising performance improvements provided by the proposed device. Finally, heating and mechanical characteristics associated with freestanding microstructures are briefly evaluated using finite-element method simulations.en
dc.format.mimetypeapplication/pdf
dc.language.isoengpt_BR
dc.relation.ispartofIEEE transactions on microwave theory and techniques. New York. Vol. 48, n. 8 (aug. 2000), p. 1326-1335pt_BR
dc.rightsOpen Accessen
dc.subjectInductorsen
dc.subjectMicroeletrônicapt_BR
dc.subjectMicromachined devicesen
dc.subjectMicromachiningen
dc.subjectMMICen
dc.subjectPlanar transformersen
dc.subjectSuspended microstripen
dc.titleMicromachined microwave planar spiral inductors and transformerspt_BR
dc.typeArtigo de periódicopt_BR
dc.identifier.nrb000289796pt_BR
dc.type.originEstrangeiropt_BR


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