Navegação Ciências Exatas e da Terra por Assunto "Trocas químicas"
Resultados 1-3 de 3
-
Comparison of nitrogen incorporation in SiO/sub 2//SiC and SiO/sub 2/Si structures
(2000) [Artigo de periódico]The nitrogen content of SiO2/SiC (4H) structures annealed in NO and N2O has been measured using nuclear reaction analysis. Samples were annealed in 15N18O or 15N2O at 1000 °C at a static pressure of 10 mbar for either 1 ... -
Effects of post-deposition annealing in O/sub 2/ on the electrical characteristics of LaAlO/sub 3/ films on Si
(2005) [Artigo de periódico]LaAlO3 films were deposited on p-type Si 100 by sputtering from a LaAlO3 target. C V characteristics were determined in nonannealed and O2-annealed capacitors having LaAlO3 films as dielectric and RuO2 as top electrode. ... -
Water vapor interaction with silicon oxide films thermally grown on 6H-SiC and Si
(2009) [Artigo de periódico]Thermally induced incorporation of isotopically labeled water vapor D2 18O species in 7 nm thick SiO2 films thermally grown on 6H-SiC 0001 and on Si 001 were investigated. Higher incorporation of hydrogen and higher isotopic ...