• Unraveling structural and compositional information in 3D FinFET electronic devices 

      Trombini, Henrique; Marmitt, Gabriel Guterres; Vellame, Igor Alencar; Baptista, Daniel Lorscheitter; Reboh, Shay; Mazen, Frédéric; Pinheiro, Rafael Bortolin; Sanchez, Dario Ferreira; Senna, Carlos Alberto; Archanjo, Braulio Soares; Achete, Carlos A.; Grande, Pedro Luis (2019) [Artigo de periódico]
      Non-planar Fin Field Effect Transistors (FinFET) are already present in modern devices. The evolution from the well-established 2D planar technology to the design of 3D nanostructures rose new fabrication processes, but a ...