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    • Role of fluorine in suppressing boron transient enhanced diffusion in preamorphized Si 

      Impellizzeri, Giuliana; Santos, Jose Henrique Rodrigues dos; Mirabella, Salvatore; Priolo, Francesco; Napolitani, Enrico; Carnera, Alberto (2004) [Journal article]
      We have explained the role of fluorine in the reduction of the self-interstitial population in a preamorphized Si layer under thermal treatment. For this purpose, we have employed a B spike layer grown by molecular-beam ...