Nitrogen transport during rapid thermal growth of silicon oxynitride films in N/sub 2/ O
dc.contributor.author | Baumvol, Israel Jacob Rabin | pt_BR |
dc.contributor.author | Stedile, Fernanda Chiarello | pt_BR |
dc.contributor.author | Ganem, Jean-Jacques | pt_BR |
dc.contributor.author | Trimaille, Isabelle | pt_BR |
dc.contributor.author | Rigo, Serge | pt_BR |
dc.date.accessioned | 2016-05-11T02:10:16Z | pt_BR |
dc.date.issued | 1996 | pt_BR |
dc.identifier.issn | 0003-6951 | pt_BR |
dc.identifier.uri | http://hdl.handle.net/10183/140707 | pt_BR |
dc.description.abstract | We investigated the transport of nitrogenous species during rapid thermal growth of silicon oxynitride films on Si in N2O, using N isotopic tracing and high resolution depth profiling techniques. The results indicate that the diffusion of nitrogenous species ~most probably NO! through the growing oxynitride film to react with Si at the oxynitride/Si interface, induces the incorporation of N near this interface. This mechanism acts in parallel with a site-to-site jump mechanism ~interstitialcy or vacancy! of diffusion and chemical reaction of nitrogenous species in the volume of the growing oxynitride film. The characteristic N accumulation only near the interface obtained by rapid thermal processing growth in N2O is due to the removal of N from the near surface region of the films, here attributed to atomic exchanges O-N taking place during growth. Furthermore, N-N exchange was also observed. | en |
dc.format.mimetype | application/pdf | pt_BR |
dc.language.iso | eng | pt_BR |
dc.relation.ispartof | Applied physics letters. New York. Vol. 69, n. 16 (Oct. 1996), p. 2385-2387 | pt_BR |
dc.rights | Open Access | en |
dc.subject | Física da matéria condensada | pt_BR |
dc.subject | Nitrogênio | pt_BR |
dc.subject | Filmes finos | pt_BR |
dc.subject | Filmes finos : Crescimento : Tratamento térmico | pt_BR |
dc.title | Nitrogen transport during rapid thermal growth of silicon oxynitride films in N/sub 2/ O | pt_BR |
dc.type | Artigo de periódico | pt_BR |
dc.identifier.nrb | 000167937 | pt_BR |
dc.type.origin | Estrangeiro | pt_BR |
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