Electrical isolation of n-type GaAs layers by proton bombardment : effects of the irration temperature
dc.contributor.author | Souza, Joel Pereira de | pt_BR |
dc.contributor.author | Danilov, Iuri | pt_BR |
dc.contributor.author | Boudinov, Henri Ivanov | pt_BR |
dc.date.accessioned | 2014-05-17T02:06:53Z | pt_BR |
dc.date.issued | 1998 | pt_BR |
dc.identifier.issn | 0021-8979 | pt_BR |
dc.identifier.uri | http://hdl.handle.net/10183/95361 | pt_BR |
dc.description.abstract | The electrical isolation in n-type GaAs layers produced by proton irradiation at temperatures from 2100 to 300°C was investigated. The threshold dose for the isolation (Dth) was found almost identical for irradiation at temperatures from - 100 to 220 °C. At 300 °C, a dose of ~=1.3 times higher is required for the isolation threshold. In samples irradiated to a dose of Dth at - 100 °C or nominal room temperature, the isolation is maintained up to a temperature of ≈ 250 °C. In those samples irradiated at 300 °C it persists up to ≈ 350 °C. For doses of 3Dth or above, the stability of the isolation is limited to temperatures of 450–650 °C, irrespective of the irradiation temperature (Ti). For practical applications where doses in excess to 5Dth are usually employed, the irradiation temperature (from - 100 to 300 °C) has only a minor effect on the formation and thermal stability of the electrical isolation. | en |
dc.format.mimetype | application/pdf | pt_BR |
dc.language.iso | eng | pt_BR |
dc.relation.ispartof | Journal of Applied Physics. Woodbury. Vol. 84, no. 9 (Nov. 1998), p. 4757-4760 | pt_BR |
dc.rights | Open Access | en |
dc.subject | Interacoes proton-proton | pt_BR |
dc.subject | Arseneto de galio | pt_BR |
dc.subject | Dopagem de semicondutores | pt_BR |
dc.subject | Condutividade elétrica | pt_BR |
dc.subject | Prótons | pt_BR |
dc.title | Electrical isolation of n-type GaAs layers by proton bombardment : effects of the irration temperature | pt_BR |
dc.type | Artigo de periódico | pt_BR |
dc.identifier.nrb | 000124324 | pt_BR |
dc.type.origin | Estrangeiro | pt_BR |
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