Evidence of C migration in the SiO2 to the SiO2/Si interface of C-implanted structures

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Date

2023

Author

Maltez, Rogério Luis

Type

Technical and Research Report

URI

http://hdl.handle.net/10183/294602

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Subject

Carbeto de silício

Implantacao ionica

Microscopia eletrônica de transmissão

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Technical and Research Reports (303)

Technical and Research Reports (303)

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