Thinning of Poly(methyl methacrylate) and Poly(vinyl chloride) thin films induced by high-energy ions of different stopping powers

Abstract

Ion bombardment is an important tool of materials processing, but usually leads to erosion of the surface and significant thickness reductions when thin layers are used. The growing use of polymer thin films in a variety of applications, from coatings and membranes to biomedical and electronic devices, calls for a deeper understanding of the thinning process induced by energetic ions espe-cially for very thin films. Here, thinning and surface morphology changes induced by high-energy ion bombardment in PMMA and PVC thin films were investigated, focusing on the role of the initial thickness of the films and the stopping power of the ions. We used thin films with initial thicknesses varying from 13 to 800 nm, and light and heavy ions as projectiles in the energy range of 2–2000 MeV, where the electronic stopping dominates. Thickness reductions as a function of fluence were monitored and thinning cross sections were extracted from curves. A supralinear scaling between the thinning cross sections and the electronic stopping power of the beams was observed, with a much enhanced thinning efficiency for the swift heavy ions. The scaling with the stopping power dE/dx is almost independent of the initial thickness of the films. At intermediate and large fluences, changes in the physicochemical properties of the irradiated polymers may modulate and decelerate the thinning process of the remaining film. The importance of this secondary process depends on the stopping power and the balance between erosion and the chemical transformations induced by the beam. We also observe a trend for the thinning efficiency to become larger in very thin films. Depending on the type of beam and polymer, this effect is more or less pronounced. PMMA films irradiated with 2 MeV H+ show the most systematic correlation between initial thickness and thinning cross sections, while in PVC films the initial thickness plays a minor role for all investigated beams.