Listar Ingeniería por autor "David, Marie-Laure"
Mostrando ítems 1-1 de 1
-
Lithium implantation at low temperature in silicon for sharp buried amorphous layer formation and defect engineering
Oliviero, Erwan Marie Hubert; David, Marie-Laure; Fichtner, Paulo Fernando Papaleo; Beaufort, Marie France; Barbot, Jean François (2013) [Artículo de periódico]The crystalline-to-amorphous transformation induced by lithium ion implantation at low temperature has been investigated. The resulting damage structure and its thermal evolution have been studied by a combination of ...