Browsing Engineering by Author "Barbot, Jean François"
Now showing items 1-4 of 4
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H-induced subcritical crack propagation and interaction phenomena in (001) Si using He-cracks templates
Reboh, Shay; Barbot, Jean François; Beaufort, Marie France; Fichtner, Paulo Fernando Papaleo (2010) [Journal article]H and He ion implantations allow the formation of nanocracks within controlled subsurface depths in semiconducting materials. Upon annealing, crack propagation and coalescence provides a way of cutting monocrystalline thin ... -
Lithium implantation at low temperature in silicon for sharp buried amorphous layer formation and defect engineering
Oliviero, Erwan Marie Hubert; David, Marie-Laure; Fichtner, Paulo Fernando Papaleo; Beaufort, Marie France; Barbot, Jean François (2013) [Journal article]The crystalline-to-amorphous transformation induced by lithium ion implantation at low temperature has been investigated. The resulting damage structure and its thermal evolution have been studied by a combination of ... -
On the microstructure of Si coimplanted with H+ and He+ ions at moderate energies
Reboh, Shay; Silva, Fernando Schaurich; Declemy, Alain; Barbot, Jean François; Beaufort, Marie France; Cherkashin, Nikolay; Fichtner, Paulo Fernando Papaleo (2010) [Journal article]We report on the microstructure of silicon coimplanted with hydrogen and helium ions at moderate energies. X-ray diffraction investigations in as-implanted samples show the direct correlation between the lattice strain and ... -
Orientation of H platelets under local stress in Si
Reboh, Shay; Beaufort, Marie France; Barbot, Jean François; Grilhé, Jean; Fichtner, Paulo Fernando Papaleo (2008) [Journal article]Hydrogen is implanted into 001 silicon under the strain field of previously formed overpressurized helium plates. Upon thermal annealing, the hydrogen atoms precipitate into platelet structures oriented within specific 111 ...