• Aluminum mobility and interfacial segregation in fully silicided gate contacts 

      Pezzi, Rafael Peretti; Copel, Matthew; Cabral Junior, C.; Baumvol, Israel Jacob Rabin (2005) [Artigo de periódico]
      The mobility of aluminum implanted as a dopant of fully silicided nickel for advanced metal gates has been investigated following rapid thermal annealing at temperatures ranging from 160 to 700 °C. Resonant nuclear reaction ...