Navegação Ciências Exatas e da Terra por Autor "Drozdov, Yu. N."
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Spatial separation of vacancy and interstitial defects formed in Si by oxygen-ion irradiation at elevated temperature
Danilov, Iuri; Boudinov, Henri Ivanov; Souza, Joel Pereira de; Drozdov, Yu. N. (2005) [Artigo de periódico]A study of damage depth distribution in Si by elevated temperature O+-ion implantation was performed using three structures: (i) bulk Si, (ii) Si/SiO2 /bulk Si, and (iii) SiO2 /bulk Si. The samples were implanted at 250°C ...