Listar Ciencias Exactas y Naturales por autor "Schmeisser, Dieter"
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Influence of CO annealing in metal-oxide-semiconductor capacitors with SiO2 films thermally grown on Si and on SiC
Pitthan Filho, Eduardo; Reis, Roberto dos; Corrêa, Silma Alberton; Schmeisser, Dieter; Boudinov, Henri Ivanov; Stedile, Fernanda Chiarello (2016) [Artículo de periódico]Understanding the influence of SiC reaction with CO, a by-product of SiC thermal oxidation, is a key point to elucidate the origin of electrical defects in SiC metal-oxide-semiconductor (MOS) devices. In this work, the ...