Listar Ciencias Exactas y Naturales por autor "Cabral Junior, C."
Mostrando ítems 1-1 de 1
-
Aluminum mobility and interfacial segregation in fully silicided gate contacts
Pezzi, Rafael Peretti; Copel, Matthew; Cabral Junior, C.; Baumvol, Israel Jacob Rabin (2005) [Artículo de periódico]The mobility of aluminum implanted as a dopant of fully silicided nickel for advanced metal gates has been investigated following rapid thermal annealing at temperatures ranging from 160 to 700 °C. Resonant nuclear reaction ...