Browsing Exact and Earth Sciences by Author "Zamora, R. R. M."
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Effects of thermal annealing on the structural, mechanical, and tribological properties of hard fluorinated carbon films deposited by plasma enhanced chemical vapor deposition
Costa, Marcelo Eduardo Huguenin Maia da; Baumvol, Israel Jacob Rabin; Radtke, Claudio; Jacobsohn, Luiz Gustavo; Zamora, R. R. M.; Freire Junior, Fernando Lazaro (2004) [Journal article]Hard amorphous fluorinated carbon films (a-C:F) deposited by plasma enhanced chemical vapor deposition were annealed in vacuum for 30 min in the temperature range of 200–600 °C. The structural and compositional modifications ...