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    • Electrical isolation of Al/sub x/Ga/sub 1-x/As by ion irradiation 

      Van Lippen, Twan; Boudinov, Henri Ivanov; Tan, Hoe H.; Jagadish, Chenupati (2002) [Journal article]
      The evolution of sheet resistance Rs of n-type and p-type conductive AlxGa12xAs layers (x=0.3, 0.6, and 1.0) during proton irradiation was investigated. The threshold dose Dth to convert a conductive layer to a highly ...