Browsing Exact and Earth Sciences by Author "Nguyen, N. V."
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Compositional stability of hafnium aluminates thin films deposited on Si by atomic layer deposition
Driemeier, Carlos Eduardo; Bastos, Karen Paz; Miotti, Leonardo; Baumvol, Israel Jacob Rabin; Nguyen, N. V.; Sayan, S.; Krug, Cristiano (2005) [Journal article]We have used nuclear reaction analyses and Rutherford backscattering spectrometry to investigate quantitatively the compositional stability of hafnium aluminate thin films deposited on Sis001d by atomic layer deposition ... -
Optical band gaps and composition dependence of hafnium–aluminate thin films grown by atomic layer chemical vapor deposition
Nguyen, N. V.; Sayan, S.; Levin, Igor; Ehrstein, James R.; Baumvol, Israel Jacob Rabin; Driemeier, Carlos Eduardo; Krug, Cristiano; Wielunski, Leszek S.; Hung, Puiyee Y.; Diebold, Alain (2005) [Journal article]We report the optical properties of unannealed hafnium–aluminate HfAlO films grown by atomic layer chemical vapor deposition ALCVD and correlate them with the aluminum contents in the films. Vacuum ultraviolet spectroscopic ...