Browsing Exact and Earth Sciences by Author "Nandi, Sanjoy K."
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Determination of thickness and composition of high-k dielectrics using high-energy electrons
Grande, Pedro Luis; Vos, Maarten; Venkatachalam, Dinesh K.; Nandi, Sanjoy K.; Elliman, R. G. (2013) [Journal article]We demonstrate the application of high-energy elastic electron backscattering to the analysis of thin (2–20 nm) HfO2 overlayers on oxidized Si substrates. The film composition and thickness are determined directly from ... -
A high-energy electron scattering study of the electronic structure and elemental composition of O-implanted Ta films used for the fabrication of memristor devices
Vos, Maarten; Grande, Pedro Luis; Nandi, Sanjoy K.; Venkatachalam, Dinesh K.; Elliman, R. G. (2013) [Journal article]High-energy electron scattering is used to investigate Ta films implanted with 10 keV O ions. These films are of interest as they have been used for the fabrication of memristors. High-energy electron scattering is used ...