Browsing Exact and Earth Sciences by Author "Gorris, Franck"
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Isotopic substitution of si during thermal growth of ultrathin silicon-oxide films on si(111) in o/sub 2/
Baumvol, Israel Jacob Rabin; Krug, Cristiano; Stedile, Fernanda Chiarello; Gorris, Franck; Schulte, Wolf Hartmut (1999) [Journal article]The transport of Si atoms during thermal growth of silicon-oxide films on silicon in dry O2 was investigated by isotopic substitution of Si. The experiment consisted of depositing a 7.6-nm-thick epitaxial layer of 29Si on ...