Browsing Exact and Earth Sciences by Author "Frank, Martin M."

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    • Enhanced initial growth of atomic-layer-deposited metal oxides on hydrogen-terminated silicon 

      Frank, Martin M.; Chabal, Yves Jean; Green, Martin L.; Delabie, Annelies; Brijs, Bert; Wilk, Glen D.; Ho, Mun-Yee; Rosa, Elisa Brod Oliveira da; Baumvol, Israel Jacob Rabin; Stedile, Fernanda Chiarello (2003) [Journal article]
      A route is presented for activation of hydrogen-terminated Si(100) prior to atomic layer deposition. It is based on our discovery from in situ infrared spectroscopy that organometallic precursors can effectively initiate ...