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    • Damage accumulation in neon implanted silicon 

      Oliviero, Erwan Marie Hubert; Peripolli, Suzana Bottega; Amaral, Livio; Fichtner, Paulo Fernando Papaleo; Beaufort, Marie France; Barbot, Jean François; Donnelly, Stephen Eastwood (2006) [Journal article]
      Damage accumulation in neon-implanted silicon with fluences ranging from 5x1014 to 5x1016 Ne cm-² has been studied in detail. As-implanted and annealed samples were investigated by Rutherford backscattering spectrometry ...