Browsing Exact and Earth Sciences by Author "Cabral Junior, C."

Now showing items 1-1 of 1

    • Aluminum mobility and interfacial segregation in fully silicided gate contacts 

      Pezzi, Rafael Peretti; Copel, Matthew; Cabral Junior, C.; Baumvol, Israel Jacob Rabin (2005) [Journal article]
      The mobility of aluminum implanted as a dopant of fully silicided nickel for advanced metal gates has been investigated following rapid thermal annealing at temperatures ranging from 160 to 700 °C. Resonant nuclear reaction ...