Comment on "Atomic transport and chemical stability during annealing of ultrathin Al/sub 2/O/sub 3/ films on Si" : reply

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Date
2001Author
Type
Subject
In
Physical review letters. Woodbury. Vol. 86, no. 20 (May 2001), p. 4714
Source
Foreign
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Journal Articles (42202)Exact and Earth Sciences (6312)
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