Navegação por Assunto "Interdifusao quimica"
Resultados 1-8 de 8
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Aluminum mobility and interfacial segregation in fully silicided gate contacts
(2005) [Artigo de periódico]The mobility of aluminum implanted as a dopant of fully silicided nickel for advanced metal gates has been investigated following rapid thermal annealing at temperatures ranging from 160 to 700 °C. Resonant nuclear reaction ... -
Comparison of nitrogen incorporation in SiO/sub 2//SiC and SiO/sub 2/Si structures
(2000) [Artigo de periódico]The nitrogen content of SiO2/SiC (4H) structures annealed in NO and N2O has been measured using nuclear reaction analysis. Samples were annealed in 15N18O or 15N2O at 1000 °C at a static pressure of 10 mbar for either 1 ... -
Composition, atomic transport, and chemical stability of ZrAl/sub x/O/sub y/ ultrathin films deposited on Si(001)
(2001) [Artigo de periódico]The stability of a ZrAlxOy film sputtered on Si upon thermal annealing in vacuum or in O2 was investigated. X-ray diffraction indicated that the as-deposited film was amorphous and remained so after annealing. Rutherford ... -
Diffusion reaction of oxigen in aluminum oxide films on silicon
(2002) [Artigo de periódico]Aluminum oxide films deposited on silicon by atomic layer chemical vapor deposition were annealed in an ¹⁸O-enriched oxygen atmosphere under various conditions of temperature, time, and pressure. Cavity formation at the ... -
Effect of interface intermixing on giant magnetoresistance in NiFe/Cu and Co/NiFe/Co/Cu multilayers
(2003) [Artigo de periódico]This article reports on the important influence of the spontaneously built-in paramagnetic interfacial layers on the magnetic and magnetoresistive properties of NiFe/Cu and Co/NiFe/Co/Cu multilayers grown by magnetron ... -
Formation of epitaxial [Beta]-Sn islands at the interface of SiO/sub 2/Si layers implanted with Sn ions
(2005) [Artigo de periódico]180 nm SiO2 layers on Si s100d were implanted with Sn ions producing a profile with a peak concentration of 3 at. % at the middle of the oxide. After high temperature s900–1100 °Cd annealing, an array of b-Sn islands ... -
Mistura atômica na bicamada Fe/Al induzida por feixe de íons
(1991) [Tese]Quando dirigimos nossa atenção ao deslocamento e rearranjo dos átomos de um alvo submetido à irradiação com feixe de Íons energéticos, designamos o fenômeno como Mistura Por Feixe De Íons, ou abreviadamente, IM ( do inglês ... -
Thermal stability and diffusion in gadolinium silicate gate dielectric films
(2001) [Artigo de periódico]Gadolinium silicate films on Si(100) annealed in oxygen and vacuum at temperatures up to 800 °C were analyzed by Rutherford backscattering and narrow resonance nuclear profiling. Oxygen diffused into the film eliminating ...