Browsing by Author "Bay, H.L."
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Patternig method for silicides based on local oxidation
Mantl, S.; Dolle, M.; Mesters, St.; Fichtner, Paulo Fernando Papaleo; Bay, H.L. (1995) [Journal article]Oxidation of CoSi2 layers on Si~100! using oxidation masks has been investigated. It is shown that local oxidation can be used to pattern the silicide layer. This method allows the formation of buried interconnects and ...